Patent holdings for IPC class G03F 1/60

Total number of patents in this class: 211

10-year publication summary

11
16
20
26
17
27
17
19
23
6
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hoya Corporation
2822
42
Shin-Etsu Chemical Co., Ltd.
5132
25
Agc, Inc.
4029
17
Applied Materials, Inc.
16587
11
Taiwan Semiconductor Manufacturing Company, Ltd.
36809
11
Carl Zeiss SMS Ltd.
44
10
Samsung Electronics Co., Ltd.
131630
6
Samsung Display Co., Ltd.
30585
6
Nikon Corporation
7162
4
ASML Netherlands B.V.
6816
4
Carl Zeiss SMT GmbH
2646
4
Kioxia Corporation
9847
4
SK Enpulse Co., Ltd.
103
4
LG Chem, Ltd.
17205
3
Innolux Corporation
3151
3
Asahi Glass Company, Limited
2985
3
Boe Technology Group Co., Ltd.
35384
3
Semes Co., Ltd.
1119
3
Toppan Photomask Co., Ltd.
56
3
Canon Inc.
36841
2
Other owners 43